High-Performance Non-Contact Ultrasonic Cleaning for Sensitive Substrates

The UVU Series Ultrasonic Dry Cleaner sets the benchmark in non-contact cleaning for high-value substrates across industries including film, semiconductors, batteries, and PCBs. Leveraging advanced ultrasonic technology, the UVU removes 100% of particles as small as 1 μm—all without any physical contact or surface damage.

This cutting-edge system is engineered for both roll-to-roll and flat substrate applications, offering exceptional cleaning performance in high-speed production environments.

Key Features

✅ Non-Contact Cleaning: Safely removes contaminants without touching or scratching the substrate.

✅ High Particle Removal Efficiency: Achieves 100% removal of particles ≥1 μm.

✅ Consistent Ultrasonic Performance: No degradation in cleaning power over time.

✅ Flexible Configurations: Supports roll-to-roll processes (up to 11 meters effective length) and flat substrates.

✅ Broad Application Range: Ideal for films, glass, semiconductors, PCBs/FPCBs, batteries, automotive parts, and more.

✅ Field-Tested Results: Proven cleaning performance in clean room conditions.

Detailed Product Information

Performance & Testing

In cleanroom tests conducted at SHINKO, the UVU demonstrated exceptional particle removal capabilities on PET film at a high production speed of 200 meters/minute with a cleaning distance of just 2 mm from the substrate. The system successfully removed environmental particles using a liquid particle counter under the following conditions:

• Substrate: PET Film

• Pressure: 12 kPa

• Cleaning Distance: 2 mm

• Line Speed: 200 m/min

• Particles: Environmental contamination

Note: Removal rates may vary depending on particle type and production environment.

Application Versatility

The UVU is designed for high-performance dry cleaning in a variety of industries and substrates:

• Films & Foils – Including PET, metallic foils, and packaging films

• Glass Panels – For displays and solar modules

• Semiconductors – Wafer and panel-level substrate cleaning

• Batteries – Rechargeable battery films and components

• PCBs & FPCBs – Printed and flexible circuit board surface cleaning

• Automotive Components – Surface preparation for electronic and optical systems